Título
Off Stoichiometric Silicon Oxide Applied to Enhance the Silicon Responsivity up to UV Region
Autor
MARIANO ACEVES MIJARES
Nivel de Acceso
Acceso Abierto
Materias
Resumen o descripción
Silicon Rich Oxide (SRO) is a material compatible
with silicon integrated technology, besides it has
photoluminescent properties. When SRO is illuminated
with UV radiation emission in the range of 600 to 800
nm take place. This radiation has been applied to a
silicon PN junction in order to expand the capabilities
of silicon improving its detection properties. In this
work a more precise characterization of a sensor made
of silicon and SRO is done. The response of this sensor
goes from 200 nm to standard Si detection range, and
in the range of 200 to 400 nm it increases with the
wavelength.
Fecha de publicación
2007
Tipo de publicación
Memoria de congreso
Versión de la publicación
Versión enviada
Recurso de información
Formato
application/pdf
Idioma
Inglés
Repositorio Orígen
Fuente de Objetos Científicos Open Access
Descargas
302