Título

Off Stoichiometric Silicon Oxide Applied to Enhance the Silicon Responsivity up to UV Region

Autor

MARIANO ACEVES MIJARES

Nivel de Acceso

Acceso Abierto

Resumen o descripción

Silicon Rich Oxide (SRO) is a material compatible

with silicon integrated technology, besides it has

photoluminescent properties. When SRO is illuminated

with UV radiation emission in the range of 600 to 800

nm take place. This radiation has been applied to a

silicon PN junction in order to expand the capabilities

of silicon improving its detection properties. In this

work a more precise characterization of a sensor made

of silicon and SRO is done. The response of this sensor

goes from 200 nm to standard Si detection range, and

in the range of 200 to 400 nm it increases with the

wavelength.

Fecha de publicación

2007

Tipo de publicación

Memoria de congreso

Versión de la publicación

Versión enviada

Formato

application/pdf

Idioma

Inglés

Repositorio Orígen

Fuente de Objetos Científicos Open Access

Descargas

302

Comentarios



Necesitas iniciar sesión o registrarte para comentar.