Título

Polysilicon thermal microactuators for heat scavenging and power conversión

Autor

JOSE JAVIER SANCHEZ MONDRAGON

Nivel de Acceso

Acceso Abierto

Licencia

http://creativecommons.org/licenses/by-nc-nd/4.0

Materias

CIENCIAS FÍSICO MATEMÁTICAS Y CIENCIAS DE LA TIERRA - (CTI) FÍSICA - (CTI) ÓPTICA - (CTI) OPTICA FÍSICA - (CTI)

Resumen o descripción

We describe the design and experimental characterization of two optimized thermal actuators devised to operate by means of scavenging heat from the environment. Different from the traditional MEMS thermal actuator that relies on electric current to generate heat by Joule effect, the devices presented here are optimized to absorb external heat and convert it into mechanical displacement and force. The behavior of vertical and horizontal microactuators fabricated in a standard Surface micromachining process (PolyMUMPs, Research Triangle Park, North Carolina) demonstrates the viability of exploiting heat from the surrounding medium to realize batteryless microsystems. Analytical and finite element models are provided in support of the design. Results show that fairly large and useful displacements can be achieved at commonly available operating temperatures.

Editor

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Fecha de publicación

2009

Tipo de publicación

Artículo

Versión de la publicación

Versión aceptada

Recurso de información

http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1224

Formato

application/pdf

Idioma

Inglés

Audiencia

Estudiantes

Investigadores

Público en general

Sugerencia de citación

Varona, Jorge, et al., (2009). Polysilicon thermal microactuators for heat scavenging and power conversión, Journal of Micro/ Nanolithography, MEMS, and MOEMS. Vol.8(2): 023020-1- 023020-8

Repositorio Orígen

Repositorio Institucional del INAOE

Descargas

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