Título

Micro-hole drilling in thin films with cw low power lasers

Autor

JULIO CESAR RAMIREZ SAN JUAN

JUAN PABLO PADILLA MARTINEZ

Plácido Zaca Morán

RUBEN RAMOS GARCIA

Nivel de Acceso

Acceso Abierto

Licencia

http://creativecommons.org/licenses/by-nc-nd/4.0

Materias

Laser materials processing - (INSPEC) Thermal effects - (INSPEC) Damage - (INSPEC) Microstructure fabrication - (INSPEC) Micro-optical devices - (INSPEC) CIENCIAS FÍSICO MATEMÁTICAS Y CIENCIAS DE LA TIERRA - (CTI) FÍSICA - (CTI) ÓPTICA - (CTI) ÓPTICA - (CTI)

Resumen o descripción

In this work, we perform drilling of micro-holes and micro-patterning in indium tin oxide (ITO) and titanium thin films. In ITO films the drilling is performed by thermocavitation only; meanwhile in titanium two competing processes are identified: (i) laser-induced sublimation producing high-quality micro-holes comparable to those produced with femtosecond pulses but at a reduced cost and (ii) erosion by thermocavitation which tend to degrade the quality of the micro-holes. The micro-holes can be employed as micrometer light sources for use in point-diffraction interferometers or spatial filters; in addition, micron-sized resolution patterning can be performed.

Editor

Optical Materials Express

Fecha de publicación

1 de agosto de 2011

Tipo de publicación

Artículo

Versión de la publicación

Versión aceptada

Recurso de información

http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1653

Formato

application/pdf

Idioma

Inglés

Audiencia

Estudiantes

Investigadores

Público en general

Sugerencia de citación

Ramirez San Juan, J. C., et al., (2011), Micro-hole drilling in thin films with cw low power lasers, Optical Materials Express. Vol. 1(4):598-604

Repositorio Orígen

Repositorio Institucional del INAOE

Descargas

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