Título

Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures

Autor

Abdu Orduña Díaz

Edgar Castillo Domínguez

ALFONSO TORRES JACOME

FRANCISCO JAVIER DE LA HIDALGA WADE

CARLOS GERARDO TREVIÑO PALACIOS

Nivel de Acceso

Acceso Abierto

Licencia

http://creativecommons.org/licenses/by-nc-nd/4.0

Materias

Microbolometer - (MICROBOLOMETER) Amorphous silicon - (AMORPHOUS SILICON) Micromachining - (MICROMACHINING) CIENCIAS FÍSICO MATEMÁTICAS Y CIENCIAS DE LA TIERRA - (CTI) FÍSICA - (CTI) ELECTRÓNICA - (CTI) ELECTRÓNICA - (CTI)

Resumen o descripción

We present the design, micromachining and characterization of a bidimentional bolometer array for radiation detection in the 0.7-1.5 THz frequency range. The detector is based on a boron doped amorphous silicon film (a-Si-B:H). The film optimized for sensitivity enhancement was obtained using 500 sccm diborane flow with 95 nm thickness. The sensing layer was deposited using plasma enhanced chemical vapor deposition (PECVD) technique at low frequency on a 0.45 μm thick silicon nitride membrane sustained by a micromachined frame in crystalline silicon. The design consists of four 5x5 bolometer arrays made by conventional lithography. The bolometer active area is 660 μm x 420 μm and the detector will operate as a focal plane array. The current–voltage characteristics present an ohmic behaviour; the temperature coefficient of resistance (TCR) was obtained by measuring the bolometer performance from room temperature down to liquid nitrogen temperature. The responsivity was measured under illumination from a black body radiating at 300, 500, 700, 900 and 1100 °C, obtaining a value of R =1.17 x 10−2 A/W with a dark current of 4.43 x 10−9 A

Editor

IOP Publishing

Fecha de publicación

2011

Tipo de publicación

Artículo

Versión de la publicación

Versión aceptada

Recurso de información

http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1718

Formato

application/pdf

Idioma

Inglés

Relación

&

X Encuentro de Óptica, Láseres y Aplicaciones, Journal of Physics: Conference Series, (274):1-5

Audiencia

Estudiantes

Investigadores

Público en general

Sugerencia de citación

Orduña-Díaz, A., et al., (2011). Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures, XVII Reunión Iberoamericana de Óptica

Repositorio Orígen

Repositorio Institucional del INAOE

Descargas

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