Título

Compositional and structural characterization of silicon nanoparticles embedded in silicon rich oxide

Autor

JOSE ALBERTO LUNA LOPEZ

MARIANO ACEVES MIJARES

OLEKSANDR MALIK

JORGE EDUARDO RICKARDS CAMPBELL

Nivel de Acceso

Acceso Abierto

Licencia

http://creativecommons.org/licenses/by-nc-nd/4.0

Materias

Silicon rich oxide - (SILICON RICH OXIDE) AFM - (AFM) HRTEM - (HRTEM) Nanocrystals - (NANOCRYSTALS) Surface roughness - (SURFACE ROUGHNESS) RBS - (RBS) XPS - (XPS) CIENCIAS FÍSICO MATEMÁTICAS Y CIENCIAS DE LA TIERRA - (CTI) FÍSICA - (CTI) ELECTRÓNICA - (CTI)

Resumen o descripción

Silicon Rich Oxide (SRO) is a dielectric material that contains Si nanoparticles, thus showing novel physical characteristics which permits

its use in optoelectronic devices. In this work, the composition and structure at the surface, volume and Si/SRO interface of the SRO films deposited on c-Si substrates were studied. Different techniques, such as Atomic Force Microscopy (AFM), High Resolution Transmission Electronic Microscopy (HRTEM), Rutherford Backscattering Spectrometry (RBS) and X-ray Photoelectron Spectroscopy (XPS) were used in the study. XPS and RBS reveal that the composition of the films varied with respect to the gas flow ratio. These results allow us to correlate the compositional and structural [as size of the grains (roughness), nc-Si size and different oxidation states of Si] changes of the surface, volume and interface from the SRO films with the flow ratio (Ro) used during the deposition process and with the high temperature annealing time.

Editor

REVISTA MEXICANA DE FÍSICA

Fecha de publicación

diciembre de 2007

Tipo de publicación

Artículo

Versión de la publicación

Versión aceptada

Recurso de información

http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/893

Formato

application/pdf

Idioma

Inglés

Audiencia

Estudiantes

Investigadores

Público en general

Sugerencia de citación

J. Rickards

Repositorio Orígen

Repositorio Institucional del INAOE

Descargas

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