Título
Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films
Autor
JUAN RAMOS CANO
ABEL HURTADO MACIAS
WILBER ANTUNEZ FLORES
LUIS EDMUNDO FUENTES COBAS
PATRICIA AMEZAGA MADRID
MARIO MIKI YOSHIDA
Nivel de Acceso
Acceso Abierto
Materias
Resumen o descripción
Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 °C, in a Pb-rich atmosphere, for 4 and 6 h. The evolution of compositions and microstructure of the films was characterized before and after annealing, by grazing incidence X-ray diffraction, two-dimensional detection of grazing incidence diffraction with synchrotron radiation, scanning electronmicroscopy and high resolution transmission electron microscopy. X-ray diffraction results showed that the crystalline structure of optimized PbTiO3 films corresponded to a tetragonal perovskite-type, with lattice parameters a=0.387(4)nmand c=0.406(4)nm. In addition, the inverse pole figure of the fiber texture representation, had a Gaussian (1, 1, 0) component and distribution width Ω=15°.
Fecha de publicación
2013
Tipo de publicación
Artículo
Versión de la publicación
Versión enviada
Recurso de información
Formato
application/pdf
Idioma
Inglés
Repositorio Orígen
Fuente de Objetos Científicos Open Access
Descargas
411