Título

Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films

Autor

JUAN RAMOS CANO

ABEL HURTADO MACIAS

WILBER ANTUNEZ FLORES

LUIS EDMUNDO FUENTES COBAS

PATRICIA AMEZAGA MADRID

MARIO MIKI YOSHIDA

Nivel de Acceso

Acceso Abierto

Resumen o descripción

Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 °C, in a Pb-rich atmosphere, for 4 and 6 h. The evolution of compositions and microstructure of the films was characterized before and after annealing, by grazing incidence X-ray diffraction, two-dimensional detection of grazing incidence diffraction with synchrotron radiation, scanning electronmicroscopy and high resolution transmission electron microscopy. X-ray diffraction results showed that the crystalline structure of optimized PbTiO3 films corresponded to a tetragonal perovskite-type, with lattice parameters a=0.387(4)nmand c=0.406(4)nm. In addition, the inverse pole figure of the fiber texture representation, had a Gaussian (1, 1, 0) component and distribution width Ω=15°.

Fecha de publicación

2013

Tipo de publicación

Artículo

Versión de la publicación

Versión enviada

Formato

application/pdf

Idioma

Inglés

Repositorio Orígen

Fuente de Objetos Científicos Open Access

Descargas

411

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